Semiconductor and opto-mechanics OEMs

• Unique experience in manufacturing 3-meter class ultra-stable structures
• Possibility of integrated solution on a single part: air bearing system, cooling with internal channels, mirror
• From monolithic SiC parts to possibly complex assemblies, Mersen Boostec manufactures highly stable benches, baseplates, beams, sliding structures for fast and accurate positioning, chucks
   

Boostec^® SiC solution

• Open Boostec^® SiC Solution configuration options
• High mechanical strength and absence of mechanical fatigue,
• Perfect isotropy of the SiC material,
• Flawless polishable finish which can be used as optical reference,
• Perfect stability over time,
• Water and gas tight, no outgassing, no moisture absorption,
• Wear resistance,
• Excellent chemical inertia.